The Science and Technology Facility (S&TF) at NREL in Golden, CO, is a 71,000 square-foot-building housing laboratory and office space, supporting a wide range of scientific investigations. Within the Process Development and Integration Laboratory (PDIL), NREL was looking to construct a “Clean Zone” area with an ISO Class 6 (Class 1000) clean room. As the prime-consultant and mechanical engineer, 360 Engineering and the design team prepared concept design and bridging documents for NREL’s use in procuring a design-build contract.
For the new state-of-the-art clean room, relative humidity needed to remain above 30%, and temperature control within +/- 2 degrees F. Process support systems included hazardous exhaust abatement for hydride exhaust, specialty gases from adjacent cabinets to the tools, and waste neutralization for acid etch. A mezzanine (platform) was designed above the cleanroom to provide enclosure for the clean zone humidity control; space for air handling equipment; exhaust abatement unit, and to suspend the cleanroom ceiling.